Abstract
Optical systems require kinematic mounts to align the optical components relative to a light path during installation. Depending on the application and the exact type of optical component, these mechanisms may require up to six degrees of freedom (DOFs). An industry where such optical systems are important is the semiconductor industry where high precision alignment is required for production and inspection. Hysteresis, crosstalk and resonance vibrations result in reduced precision of existing devices. In this research a monolithic decoupled adjustable optical mount manufactured using additive manufacturing is proposed as a solution. A prototype was manufactured in grade 5 titanium using Laser Beam Melting. This prototype has 4 DOFs which can be adjusted in planar translational motion with a range of 1 mm and in rotational out of plane motion with a range of 1 mrad and a resolution of 10 μm and 10 μrad. Experiments show a first eigenfrequency of 610 Hz.
| Original language | English |
|---|---|
| Title of host publication | Proceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018) |
| Editors | O. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips |
| Place of Publication | Cranfield, UK |
| Publisher | EUSPEN |
| Pages | 297-298 |
| ISBN (Print) | 978-0-99577512-1 |
| Publication status | Published - 2018 |
| Event | 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, Italy Duration: 4 Jun 2018 → 8 Jun 2018 |
Conference
| Conference | 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 |
|---|---|
| Country/Territory | Italy |
| City | Venice |
| Period | 4/06/18 → 8/06/18 |
Keywords
- Additive manufacturing
- Compliant mechanism
- Kinematic mount
- Optical alignment
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Van Hoek, N., Van Der Wijk, V., Herder, J., & Oosterhuis, G. (2018). Design of a 4 degrees of freedom decoupled monolithic compliant alignment mechanism for additive manufacturing. In O. Riemer, E. Savio, D. Billington, R. K. Leach, & D. Phillips (Eds.), Proceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018) (pp. 297-298). EUSPEN.
Van Hoek, Niek ; Van Der Wijk, Volkert ; Herder, Just et al. / Design of a 4 degrees of freedom decoupled monolithic compliant alignment mechanism for additive manufacturing. Proceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018). editor / O. Riemer ; Enrico Savio ; D. Billington ; R. K. Leach ; D. Phillips. Cranfield, UK : EUSPEN, 2018. pp. 297-298
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title = "Design of a 4 degrees of freedom decoupled monolithic compliant alignment mechanism for additive manufacturing",
abstract = "Optical systems require kinematic mounts to align the optical components relative to a light path during installation. Depending on the application and the exact type of optical component, these mechanisms may require up to six degrees of freedom (DOFs). An industry where such optical systems are important is the semiconductor industry where high precision alignment is required for production and inspection. Hysteresis, crosstalk and resonance vibrations result in reduced precision of existing devices. In this research a monolithic decoupled adjustable optical mount manufactured using additive manufacturing is proposed as a solution. A prototype was manufactured in grade 5 titanium using Laser Beam Melting. This prototype has 4 DOFs which can be adjusted in planar translational motion with a range of 1 mm and in rotational out of plane motion with a range of 1 mrad and a resolution of 10 μm and 10 μrad. Experiments show a first eigenfrequency of 610 Hz.",
keywords = "Additive manufacturing, Compliant mechanism, Kinematic mount, Optical alignment",
author = "{Van Hoek}, Niek and {Van Der Wijk}, Volkert and Just Herder and Gerrit Oosterhuis",
year = "2018",
language = "English",
isbn = "978-0-99577512-1",
pages = "297--298",
editor = "O. Riemer and Enrico Savio and D. Billington and Leach, {R. K.} and D. Phillips",
booktitle = "Proceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018)",
publisher = "EUSPEN",
note = "18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 ; Conference date: 04-06-2018 Through 08-06-2018",
}
Van Hoek, N, Van Der Wijk, V, Herder, J & Oosterhuis, G 2018, Design of a 4 degrees of freedom decoupled monolithic compliant alignment mechanism for additive manufacturing. in O Riemer, E Savio, D Billington, RK Leach & D Phillips (eds), Proceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018). EUSPEN, Cranfield, UK, pp. 297-298, 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018, Venice, Italy, 4/06/18.
Design of a 4 degrees of freedom decoupled monolithic compliant alignment mechanism for additive manufacturing. / Van Hoek, Niek; Van Der Wijk, Volkert; Herder, Just et al.
Proceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018). ed. / O. Riemer; Enrico Savio; D. Billington; R. K. Leach; D. Phillips. Cranfield, UK: EUSPEN, 2018. p. 297-298.
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review
TY - GEN
T1 - Design of a 4 degrees of freedom decoupled monolithic compliant alignment mechanism for additive manufacturing
AU - Van Hoek, Niek
AU - Van Der Wijk, Volkert
AU - Herder, Just
AU - Oosterhuis, Gerrit
PY - 2018
Y1 - 2018
N2 - Optical systems require kinematic mounts to align the optical components relative to a light path during installation. Depending on the application and the exact type of optical component, these mechanisms may require up to six degrees of freedom (DOFs). An industry where such optical systems are important is the semiconductor industry where high precision alignment is required for production and inspection. Hysteresis, crosstalk and resonance vibrations result in reduced precision of existing devices. In this research a monolithic decoupled adjustable optical mount manufactured using additive manufacturing is proposed as a solution. A prototype was manufactured in grade 5 titanium using Laser Beam Melting. This prototype has 4 DOFs which can be adjusted in planar translational motion with a range of 1 mm and in rotational out of plane motion with a range of 1 mrad and a resolution of 10 μm and 10 μrad. Experiments show a first eigenfrequency of 610 Hz.
AB - Optical systems require kinematic mounts to align the optical components relative to a light path during installation. Depending on the application and the exact type of optical component, these mechanisms may require up to six degrees of freedom (DOFs). An industry where such optical systems are important is the semiconductor industry where high precision alignment is required for production and inspection. Hysteresis, crosstalk and resonance vibrations result in reduced precision of existing devices. In this research a monolithic decoupled adjustable optical mount manufactured using additive manufacturing is proposed as a solution. A prototype was manufactured in grade 5 titanium using Laser Beam Melting. This prototype has 4 DOFs which can be adjusted in planar translational motion with a range of 1 mm and in rotational out of plane motion with a range of 1 mrad and a resolution of 10 μm and 10 μrad. Experiments show a first eigenfrequency of 610 Hz.
KW - Additive manufacturing
KW - Compliant mechanism
KW - Kinematic mount
KW - Optical alignment
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AN - SCOPUS:85054518277
SN - 978-0-99577512-1
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BT - Proceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018)
A2 - Riemer, O.
A2 - Savio, Enrico
A2 - Billington, D.
A2 - Leach, R. K.
A2 - Phillips, D.
PB - EUSPEN
CY - Cranfield, UK
T2 - 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
Y2 - 4 June 2018 through 8 June 2018
ER -
Van Hoek N, Van Der Wijk V, Herder J, Oosterhuis G. Design of a 4 degrees of freedom decoupled monolithic compliant alignment mechanism for additive manufacturing. In Riemer O, Savio E, Billington D, Leach RK, Phillips D, editors, Proceedings 18th International Conference and Exhibition of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2018). Cranfield, UK: EUSPEN. 2018. p. 297-298
